Formation of U-shaped diamond trenches with vertical {111} sidewalls by anisotropic etching of diamond (110) surfaces
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Diamond and Related Materials
سال: 2020
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2020.107713